Optoelectronic Properties of Antimony Doped Tin Oxide Thin Films Obtained by Spray Pyrolysis

نویسندگان

چکیده

Antimony doped tin oxide (ATO) thin films are deposited on corning glass substrate using the spray pyrolysis technique. The experimental parameters such as distance between and source (10-30 cm), temperature (350-450°C) atmospheres (Nitrogen Forming gas) varied to study their effect properties of ATO films. film annealed at 425°C exhibits lowest electrical resistivity 2.23×10-2 Ω-cm. Besides, in nitrogen atmosphere showed a less value 9.06×10-3 (Ω-cm) than forming gas atmosphere. with 3 at% Sb revealed highest figure merit 11.45x10-2 Ω-1. preferential orientation is observed (200) diffraction plane all cases from structural studies. Furthermore, intensity planes decreases increases. average transmittance 75% obtained for

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ژورنال

عنوان ژورنال: Materials Research-ibero-american Journal of Materials

سال: 2022

ISSN: ['1980-5373', '1516-1439']

DOI: https://doi.org/10.1590/1980-5373-mr-2021-0415